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CHA Evaporator RPA 600 E-Beam And Resistance Source

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Product Description

CHA Evaporator RPA 600 E-Beam And Resistance Source
  • Liquid cooled 26" belljar with motorized hoist control and view-port
  • Cryogenic pump, (Cryo-torr 8 cold head with compressor) liquid cooled.
  • Inficon programmable deposition controllers (2) with manual remote control
  • Liquid cooled Airco STIH 270 4- pocket electron beam gun with crucible indication
  • 10KV electron beam power supply
  • Filament evaporation source with power supply
  • Substrate heating capability to approx. 150 deg. C
  • Internal belljar lighting
  • Ionization gauges and controller for belljar and cryopump
  • Thermo gauge for belljar
  • Autotech II valve sequencer
  • 3 position variable speed planetary drive pallet system with external control
  • Substrate flipper devices with multiple evaporation angle settings
  • Automatic independent shutter control for both evaporation sources, interlocked to deposition controller.

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